The Analysis and Testing Center has a high-standard quartz material analysis and inspection laboratory environment, as well as various internationally leading precision testing instruments: ICP-OES, Fourier transform infrared detector, horizontal Fizeau interferometer, defect detector, white light interferometer, atomic force microscope, imager, etc. It is capable of conducting quartz material hydroxyl analysis, metal impurity element analysis (detection limit 0.5ppm), liquid composition analysis, supporting surface PV accuracy to X00nm level detection, X00nm level surface defect detection, 300mm large sample AFM measurement and analysis, sub-nanometer precision material surface 2D/3D analysis, etc.