Photomask Substrate Series

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Semiconductor Series

Process Tube, Boat, Ring, Window, Liner, Nozzle, Dome, Bell Jar, etc. Used in semiconductor oxidation, diffusion, epitaxy, etching, cleaning and other processes

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Optical Series

Interferometer primary mirror, coating ring, polishing sheet, window, gold-plated sheet, laser glass, etc. The products are widely used in optics, vacuum equipment, coating, laser, LED and other fields.

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Optical Communication Series

Optical fiber preform tail handle, furnace core tube, blowtorch, etc. Used in optical fiber production process.

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Photovoltaic Series

Quartz furnace tubes, quartz boats, quartz furnace doors, source bottles, thermocouple tubes, etc. Used in solar TOPCon diffusion process.

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Hefei Guangwei is committed to the finishing business of photomask substrates for TFT-LCD and IC.

Hefi GWGD Technology Co., Ltd.,

The company was established in 2020 and is a wholly-owned subsidiary of Shanghai Feilihua Shichuang Technology Co., Ltd. Hefei Guangwei is committed to the finishing business of photomask substrates for TFT-LCD and IC. Relying on the advantages of Feilihua synthetic quartz substrate materials, integrating Shanghai Feilihua Shichuang's optical processing experience, and introducing internationally leading process technologies and equipment, Hefei Guangwei has achieved a zero breakthrough in the field of domestic photomask substrate grinding and polishing finishing.

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JINAN GWST CO., LTD.

Jinan Guangwei Semiconductor Technology Co., Ltd. was established in 2023 and is a wholly-owned subsidiary of Shanghai Feilihua Shichuang Technology Co., Ltd.

The company is committed to the precision processing of high-end electronic materials. The total investment in the first phase of the project exceeds 400 million yuan, and the total planned land area is 13,000 square meters. By introducing leading foreign processes and equipment, and relying on Shanghai Feilihua Shichuang's years of accumulated optical processing experience, it is expected that mass supply of mid-to-high-end products can be achieved in 2027.